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Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering
At present, piezoelectric sensors are primarily applied in health monitoring areas. They may fall off owing to the adhesive’s durability, and even damage the monitored equipment. In this paper, a piezoelectric film sensor (PFS) based on a positive piezoelectric effect (PPE) is presented and a ZnO fi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950897/ https://www.ncbi.nlm.nih.gov/pubmed/35334685 http://dx.doi.org/10.3390/mi13030390 |