Research Progress of MEMS Inertial Switches

As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial...

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Detalles Bibliográficos
Autores principales: Liu, Min, Wu, Xinyang, Niu, Yanxu, Yang, Haotian, Zhu, Yingmin, Wang, Weidong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8951254/
https://www.ncbi.nlm.nih.gov/pubmed/35334651
http://dx.doi.org/10.3390/mi13030359

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8951254/
https://www.ncbi.nlm.nih.gov/pubmed/35334651
http://dx.doi.org/10.3390/mi13030359

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