Cargando…

Research Progress of MEMS Inertial Switches

As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial...

Descripción completa

Detalles Bibliográficos
Autores principales:	Liu, Min, Wu, Xinyang, Niu, Yanxu, Yang, Haotian, Zhu, Yingmin, Wang, Weidong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8951254/ https://www.ncbi.nlm.nih.gov/pubmed/35334651 http://dx.doi.org/10.3390/mi13030359

Ejemplares similares

Characterization of Residual Stress in SOI Wafers by Using MEMS Cantilever Beams
por: Yang, Haotian, et al.
Publicado: (2023)

Research and Analysis of MEMS Switches in Different Frequency Bands
por: Tian, Wenchao, et al.
Publicado: (2018)

The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch
por: Chen, Wenguo, et al.
Publicado: (2019)

Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration
por: Xu, Qiu, et al.
Publicado: (2017)

Research Status and Development Trend of MEMS Switches: A Review
por: Cao, Tongtong, et al.
Publicado: (2020)

Progress in Research of Flexible MEMS Microelectrodes for Neural Interface
por: Tang, Long-Jun, et al.
Publicado: (2017)

MEMS Inertial Sensor Calibration Technology: Current Status and Future Trends
por: Ru, Xu, et al.
Publicado: (2022)

An Integrated Thermal Compensation System for MEMS Inertial Sensors
por: Chiu, Sheng-Ren, et al.
Publicado: (2014)

Random Error Reduction Algorithms for MEMS Inertial Sensor Accuracy Improvement—A Review
por: Han, Shipeng, et al.
Publicado: (2020)

Rapid Prototyping of Inertial MEMS Devices through Structural Optimization
por: Giannini, Daniele, et al.
Publicado: (2021)

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers
por: Bernasconi, Roberto, et al.
Publicado: (2023)

The Recent Progress of MEMS/NEMS Resonators
por: Wei, Lei, et al.
Publicado: (2021)

Research on the Shearer Positioning Method Based on the MEMS Inertial Sensors/Odometer Integrated Navigation System and RTS Smoother
por: Zheng, Jiangtao, et al.
Publicado: (2021)

THz MEMS Switch Design
por: Feng, Yukang, et al.
Publicado: (2022)

Tracking of Gymnast's Limb Movement Trajectory Based on MEMS Inertial Sensor
por: Li, Peng, et al.
Publicado: (2022)

Recent Progress of Miniature MEMS Pressure Sensors
por: Song, Peishuai, et al.
Publicado: (2020)

Attitude Heading Reference System Using MEMS Inertial Sensors with Dual-Axis Rotation
por: Kang, Li, et al.
Publicado: (2014)

On-Line Smoothing for an Integrated Navigation System with Low-Cost MEMS Inertial Sensors
por: Chiang, Kai-Wei, et al.
Publicado: (2012)

Retracted: Tracking of Gymnast's Limb Movement Trajectory Based on MEMS Inertial Sensor
por: and Biomechanics, Applied Bionics
Publicado: (2023)

An Evaluation of MEMS-IMU Performance on the Absolute Trajectory Error of Visual-Inertial Navigation System
por: Liu, Yunfei, et al.
Publicado: (2022)

Progress of Inertial Microfluidics in Principle and Application
por: Gou, Yixing, et al.
Publicado: (2018)

MEMS Inertial Sensors Based Gait Analysis for Rehabilitation Assessment via Multi-Sensor Fusion
por: Qiu, Sen, et al.
Publicado: (2018)

Exploration and Research of Human Identification Scheme Based on Inertial Data
por: Gao, Zhenyi, et al.
Publicado: (2020)

Error and Performance Analysis of MEMS-based Inertial Sensors with a Low-cost GPS Receiver
por: Park, Minha, et al.
Publicado: (2008)

Design and Performance of a J Band MEMS Switch
por: Zhang, Naibo, et al.
Publicado: (2019)

Implementation and Performance of a Deeply-Coupled GNSS Receiver with Low-Cost MEMS Inertial Sensors for Vehicle Urban Navigation
por: Feng, Xin, et al.
Publicado: (2020)

Inertial Microfluidics Enabling Clinical Research
por: Kalyan, Srivathsan, et al.
Publicado: (2021)

MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison
por: Deppe, Olaf, et al.
Publicado: (2017)

Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors
por: Amendoeira Esteves, Rui, et al.
Publicado: (2021)

Design and Analysis of a Fluid-Filled RF MEMS Switch
por: Zhu, Hongyu, et al.
Publicado: (2023)

A High Isolation Series-Shunt RF MEMS Switch
por: Yu, Yuan-Wei, et al.
Publicado: (2009)

A Rigorous Temperature-Dependent Stochastic Modelling and Testing for MEMS-Based Inertial Sensor Errors
por: El-Diasty, Mohammed, et al.
Publicado: (2009)

Design of Ensemble Stacked Auto-Encoder for Classification of Horse Gaits with MEMS Inertial Sensor Technology
por: Lee, Jae-Neung, et al.
Publicado: (2018)

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors
por: Du, Yi-Jia, et al.
Publicado: (2018)

Comparison of MEMS switches and PIN diodes for switched dual tuned RF coils
por: Maunder, Adam, et al.
Publicado: (2018)

State-of-the-art MEMS and microsystem tools for brain research
por: Seymour, John P., et al.
Publicado: (2017)

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches
por: Donelli, Massimo, et al.
Publicado: (2022)

Translational MEMS Platform for Planar Optical Switching Fabrics
por: Sharma, Suraj, et al.
Publicado: (2019)

MIMU Optimal Redundant Structure and Signal Fusion Algorithm Based on a Non-Orthogonal MEMS Inertial Sensor Array
por: Xue, Liang, et al.
Publicado: (2023)

A Novel Optimal Configuration form Redundant MEMS Inertial Sensors Based on the Orthogonal Rotation Method
por: Cheng, Jianhua, et al.
Publicado: (2014)

Cannot write session to /tmp/vufind_sessions/sess_g57i35fsqo97d3pkbqcdm6ttun