High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro-Optic Modulators Using Photolithography Assisted Chemo-Mechanical Etching (PLACE)

Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary interconnection industries and disruptive applications. Here, we demonstrated the design and fabrication of a high...

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Detalles Bibliográficos
Autores principales: Wu, Rongbo, Gao, Lang, Liang, Youting, Zheng, Yong, Zhou, Junxia, Qi, Hongxin, Yin, Difeng, Wang, Min, Fang, Zhiwei, Cheng, Ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954017/
https://www.ncbi.nlm.nih.gov/pubmed/35334670
http://dx.doi.org/10.3390/mi13030378

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