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Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes

Thin-film electrolyte made of 8-mol% yttria stabilized zirconia (8YSZ) for solid oxide fuel cells (SOFCs) was fabricated on anode substrates using reactive magnetron sputtering of Zr-Y targets in a mixture of Ar and O(2) gases. The deposition of 4–6 µm thin-film electrolyte was in the transition or...

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Detalles Bibliográficos
Autores principales:	Solovyev, Andrey, Rabotkin, Sergey, Shipilova, Anna, Agarkov, Dmitrii, Burmistrov, Ilya, Shmakov, Alexander
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954431/ https://www.ncbi.nlm.nih.gov/pubmed/35323820 http://dx.doi.org/10.3390/membranes12030346

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