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Influence of Y Doping on WO(3) Membranes Applied in Electrolyte-Insulator-Semiconductor Structures

In this paper, tungsten oxide (WO(3)) is deposited on a silicon substrate applied in electrolyte-insulator-semiconductor structures for pH sensing devices. To boost the sensing performance, yttrium (Y) is doped into WO(3) membranes, and annealing is incorporated in the fabrication process. To invest...

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Detalles Bibliográficos
Autores principales:	Kao, Chyuan-Haur, Liao, Yu-Ching, Chuang, Chi-Chih, Huang, Yi-Hsuan, Lee, Chang-Hsueh, Chen, Shih-Ming, Lee, Ming-Ling, Chen, Hsiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954489/ https://www.ncbi.nlm.nih.gov/pubmed/35323803 http://dx.doi.org/10.3390/membranes12030328

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