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Inkjet-Printed Functionalization of CMUT-Based CO(2) Sensors
The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO(2) sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) films is optimized. It...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954632/ https://www.ncbi.nlm.nih.gov/pubmed/35336459 http://dx.doi.org/10.3390/s22062288 |