Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity

Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT (BM-PMUT), which enhances the transmitting sensitivity via simultaneously increasing the acoustic emission areas and maintaining the comparable vibration amplitude. Experimental results show that the center and edge transmitting sensitivities of the BM-PMUT are 108.1 and 96 nm/V at 370 kHz, which are 109.9 and 49.6 nm/V at 677 kHz for the traditional PMUT (T-PMUT). Thus, the BM-PMUT realizes piston-like mode shapes and achieves around twofold improvement in the effective acoustic emission area relative to the traditional T-PMUT of the same size. Due to the larger acoustic emission areas and comparable vibration amplitudes, the normalized far-field sound pressure level of the BM-PMUT is 8.5 dB higher than that of the T-PMUT.