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Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954873/ https://www.ncbi.nlm.nih.gov/pubmed/35334715 http://dx.doi.org/10.3390/mi13030423 |
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author | Qu, Mengjiao Chen, Xuying Zhu, Ke Guo, Xishan Xie, Jin |
author_facet | Qu, Mengjiao Chen, Xuying Zhu, Ke Guo, Xishan Xie, Jin |
author_sort | Qu, Mengjiao |
collection | PubMed |
description | Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT (BM-PMUT), which enhances the transmitting sensitivity via simultaneously increasing the acoustic emission areas and maintaining the comparable vibration amplitude. Experimental results show that the center and edge transmitting sensitivities of the BM-PMUT are 108.1 and 96 nm/V at 370 kHz, which are 109.9 and 49.6 nm/V at 677 kHz for the traditional PMUT (T-PMUT). Thus, the BM-PMUT realizes piston-like mode shapes and achieves around twofold improvement in the effective acoustic emission area relative to the traditional T-PMUT of the same size. Due to the larger acoustic emission areas and comparable vibration amplitudes, the normalized far-field sound pressure level of the BM-PMUT is 8.5 dB higher than that of the T-PMUT. |
format | Online Article Text |
id | pubmed-8954873 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-89548732022-03-26 Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity Qu, Mengjiao Chen, Xuying Zhu, Ke Guo, Xishan Xie, Jin Micromachines (Basel) Article Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT (BM-PMUT), which enhances the transmitting sensitivity via simultaneously increasing the acoustic emission areas and maintaining the comparable vibration amplitude. Experimental results show that the center and edge transmitting sensitivities of the BM-PMUT are 108.1 and 96 nm/V at 370 kHz, which are 109.9 and 49.6 nm/V at 677 kHz for the traditional PMUT (T-PMUT). Thus, the BM-PMUT realizes piston-like mode shapes and achieves around twofold improvement in the effective acoustic emission area relative to the traditional T-PMUT of the same size. Due to the larger acoustic emission areas and comparable vibration amplitudes, the normalized far-field sound pressure level of the BM-PMUT is 8.5 dB higher than that of the T-PMUT. MDPI 2022-03-09 /pmc/articles/PMC8954873/ /pubmed/35334715 http://dx.doi.org/10.3390/mi13030423 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Qu, Mengjiao Chen, Xuying Zhu, Ke Guo, Xishan Xie, Jin Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity |
title | Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity |
title_full | Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity |
title_fullStr | Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity |
title_full_unstemmed | Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity |
title_short | Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity |
title_sort | beam-membrane coupled piezoelectric micromachined ultrasonic transducers with enhanced transmitting sensitivity |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954873/ https://www.ncbi.nlm.nih.gov/pubmed/35334715 http://dx.doi.org/10.3390/mi13030423 |
work_keys_str_mv | AT qumengjiao beammembranecoupledpiezoelectricmicromachinedultrasonictransducerswithenhancedtransmittingsensitivity AT chenxuying beammembranecoupledpiezoelectricmicromachinedultrasonictransducerswithenhancedtransmittingsensitivity AT zhuke beammembranecoupledpiezoelectricmicromachinedultrasonictransducerswithenhancedtransmittingsensitivity AT guoxishan beammembranecoupledpiezoelectricmicromachinedultrasonictransducerswithenhancedtransmittingsensitivity AT xiejin beammembranecoupledpiezoelectricmicromachinedultrasonictransducerswithenhancedtransmittingsensitivity |