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Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity

Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT...

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Detalles Bibliográficos
Autores principales: Qu, Mengjiao, Chen, Xuying, Zhu, Ke, Guo, Xishan, Xie, Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954873/
https://www.ncbi.nlm.nih.gov/pubmed/35334715
http://dx.doi.org/10.3390/mi13030423
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author Qu, Mengjiao
Chen, Xuying
Zhu, Ke
Guo, Xishan
Xie, Jin
author_facet Qu, Mengjiao
Chen, Xuying
Zhu, Ke
Guo, Xishan
Xie, Jin
author_sort Qu, Mengjiao
collection PubMed
description Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT (BM-PMUT), which enhances the transmitting sensitivity via simultaneously increasing the acoustic emission areas and maintaining the comparable vibration amplitude. Experimental results show that the center and edge transmitting sensitivities of the BM-PMUT are 108.1 and 96 nm/V at 370 kHz, which are 109.9 and 49.6 nm/V at 677 kHz for the traditional PMUT (T-PMUT). Thus, the BM-PMUT realizes piston-like mode shapes and achieves around twofold improvement in the effective acoustic emission area relative to the traditional T-PMUT of the same size. Due to the larger acoustic emission areas and comparable vibration amplitudes, the normalized far-field sound pressure level of the BM-PMUT is 8.5 dB higher than that of the T-PMUT.
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spelling pubmed-89548732022-03-26 Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity Qu, Mengjiao Chen, Xuying Zhu, Ke Guo, Xishan Xie, Jin Micromachines (Basel) Article Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT (BM-PMUT), which enhances the transmitting sensitivity via simultaneously increasing the acoustic emission areas and maintaining the comparable vibration amplitude. Experimental results show that the center and edge transmitting sensitivities of the BM-PMUT are 108.1 and 96 nm/V at 370 kHz, which are 109.9 and 49.6 nm/V at 677 kHz for the traditional PMUT (T-PMUT). Thus, the BM-PMUT realizes piston-like mode shapes and achieves around twofold improvement in the effective acoustic emission area relative to the traditional T-PMUT of the same size. Due to the larger acoustic emission areas and comparable vibration amplitudes, the normalized far-field sound pressure level of the BM-PMUT is 8.5 dB higher than that of the T-PMUT. MDPI 2022-03-09 /pmc/articles/PMC8954873/ /pubmed/35334715 http://dx.doi.org/10.3390/mi13030423 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Qu, Mengjiao
Chen, Xuying
Zhu, Ke
Guo, Xishan
Xie, Jin
Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
title Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
title_full Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
title_fullStr Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
title_full_unstemmed Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
title_short Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
title_sort beam-membrane coupled piezoelectric micromachined ultrasonic transducers with enhanced transmitting sensitivity
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954873/
https://www.ncbi.nlm.nih.gov/pubmed/35334715
http://dx.doi.org/10.3390/mi13030423
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