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Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity

Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT...

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Detalles Bibliográficos
Autores principales:	Qu, Mengjiao, Chen, Xuying, Zhu, Ke, Guo, Xishan, Xie, Jin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954873/ https://www.ncbi.nlm.nih.gov/pubmed/35334715 http://dx.doi.org/10.3390/mi13030423

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