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Simulating the Residual Layer Thickness in Roll-to-Plate Nanoimprinting with Tensioned Webs

Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a...

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Detalles Bibliográficos
Autores principales: Snieder, Jelle, Dielen, Marc, van Ostayen, Ron A. J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955766/
https://www.ncbi.nlm.nih.gov/pubmed/35334753
http://dx.doi.org/10.3390/mi13030461