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Simulating the Residual Layer Thickness in Roll-to-Plate Nanoimprinting with Tensioned Webs
Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a...
Autores principales: | Snieder, Jelle, Dielen, Marc, van Ostayen, Ron A. J. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955766/ https://www.ncbi.nlm.nih.gov/pubmed/35334753 http://dx.doi.org/10.3390/mi13030461 |
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