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Correction: Deep learning in optical metrology: a review
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8964672/ https://www.ncbi.nlm.nih.gov/pubmed/35351854 http://dx.doi.org/10.1038/s41377-022-00757-0 |
| _version_ | 1784678269099966464 |
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| author | Zuo, Chao Qian, Jiaming Feng, Shijie Yin, Wei Li, Yixuan Fan, Pengfei Han, Jing Qian, Kemao Chen, Qian |
| author_facet | Zuo, Chao Qian, Jiaming Feng, Shijie Yin, Wei Li, Yixuan Fan, Pengfei Han, Jing Qian, Kemao Chen, Qian |
| author_sort | Zuo, Chao |
| collection | PubMed |
| description | |
| format | Online Article Text |
| id | pubmed-8964672 |
| institution | National Center for Biotechnology Information |
| language | English |
| publishDate | 2022 |
| publisher | Nature Publishing Group UK |
| record_format | MEDLINE/PubMed |
| spelling | pubmed-89646722022-04-12 Correction: Deep learning in optical metrology: a review Zuo, Chao Qian, Jiaming Feng, Shijie Yin, Wei Li, Yixuan Fan, Pengfei Han, Jing Qian, Kemao Chen, Qian Light Sci Appl Correction Nature Publishing Group UK 2022-03-27 /pmc/articles/PMC8964672/ /pubmed/35351854 http://dx.doi.org/10.1038/s41377-022-00757-0 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
| spellingShingle | Correction Zuo, Chao Qian, Jiaming Feng, Shijie Yin, Wei Li, Yixuan Fan, Pengfei Han, Jing Qian, Kemao Chen, Qian Correction: Deep learning in optical metrology: a review |
| title | Correction: Deep learning in optical metrology: a review |
| title_full | Correction: Deep learning in optical metrology: a review |
| title_fullStr | Correction: Deep learning in optical metrology: a review |
| title_full_unstemmed | Correction: Deep learning in optical metrology: a review |
| title_short | Correction: Deep learning in optical metrology: a review |
| title_sort | correction: deep learning in optical metrology: a review |
| topic | Correction |
| url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8964672/ https://www.ncbi.nlm.nih.gov/pubmed/35351854 http://dx.doi.org/10.1038/s41377-022-00757-0 |
| work_keys_str_mv | AT zuochao correctiondeeplearninginopticalmetrologyareview AT qianjiaming correctiondeeplearninginopticalmetrologyareview AT fengshijie correctiondeeplearninginopticalmetrologyareview AT yinwei correctiondeeplearninginopticalmetrologyareview AT liyixuan correctiondeeplearninginopticalmetrologyareview AT fanpengfei correctiondeeplearninginopticalmetrologyareview AT hanjing correctiondeeplearninginopticalmetrologyareview AT qiankemao correctiondeeplearninginopticalmetrologyareview AT chenqian correctiondeeplearninginopticalmetrologyareview |