Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic parameters. However, the liquid operating environment poses a challenge to maintaining a fine sensing performance, particularly through electrical characterization. This paper presents a p...

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Detalles Bibliográficos
Autores principales: Huang, Linya, Li, Wei, Luo, Guoxi, Lu, Dejiang, Zhao, Libo, Yang, Ping, Wang, Xiaozhang, Wang, Jiuhong, Lin, Qijing, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8976841/
https://www.ncbi.nlm.nih.gov/pubmed/35450325
http://dx.doi.org/10.1038/s41378-022-00368-0

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