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Vacuum-free solution-based metallization (VSM) of a-IGZO using trimethylaluminium solution

This research demonstrates a method to reduce the resistance of amorphous indium–gallium–zinc–oxide (a-IGZO) using a “vacuum-free solution-based metallization” (VSM) process, which revolutionizes the metallization process thanks to its simplicity, by simply dipping the a-IGZO into trimethyl aluminiu...

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Detalles Bibliográficos
Autores principales:	Sung, Taehoon, Song, Min-Kyu, Jung, Se-Yeon, Lee, Sein, Song, Young-Woong, Park, Solah, Kwon, Jang-Yeon
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2022
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8979349/ https://www.ncbi.nlm.nih.gov/pubmed/35425365 http://dx.doi.org/10.1039/d2ra00217e

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