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Effects of Ti Target Purity and Microstructure on Deposition Rate, Microstructure and Properties of Ti Films
Three titanium (Ti) targets with different purities were used to prepare Ti films on polyimide substrates by DC magnetron sputtering. The microstructures of Ti films were characterized by a metallographic microscope, X-ray diffractometer, field emission scanning electron microscope and three-dimensi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000231/ https://www.ncbi.nlm.nih.gov/pubmed/35407993 http://dx.doi.org/10.3390/ma15072661 |