The Theoretical and Experimental Investigation of the Fluorinated Palladium β-Diketonate Derivatives: Structure and Physicochemical Properties

To search for new suitable Pd precursors for MOCVD/ALD processes, the extended series of fluorinated palladium complexes [Pd(CH(3)CXCHCO(R))(2)] with β-diketone [tfa−1,1,1-trifluoro-2,4-pentanedionato (1); pfpa−5,5,6,6,6-pentafluoro-2,4-hexanedionato (3); hfba−5,5,6,6,7,7,7-heptafluoro-2,4-heptanedi...

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Detalles Bibliográficos
Autores principales: Dorovskikh, Svetlana I., Tryakhov, Denis E., Klyamer, Darya D., Sukhikh, Alexander S., Mirzaeva, Irina V., Morozova, Natalia B., Basova, Tamara V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000314/
https://www.ncbi.nlm.nih.gov/pubmed/35408606
http://dx.doi.org/10.3390/molecules27072207

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000314/
https://www.ncbi.nlm.nih.gov/pubmed/35408606
http://dx.doi.org/10.3390/molecules27072207

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