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Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes

The material composition and electrical properties of nanostructures obtained from focused electron beam-induced deposition (FEBID) using manganese and vanadium carbonyl precursors have been investigated. The composition of the FEBID deposits has been compared with thin films derived by the thermal...

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Detalles Bibliográficos
Autores principales:	Jungwirth, Felix, Knez, Daniel, Porrati, Fabrizio, Schuck, Alfons G., Huth, Michael, Plank, Harald, Barth, Sven
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000455/ https://www.ncbi.nlm.nih.gov/pubmed/35407228 http://dx.doi.org/10.3390/nano12071110

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