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Influences of RF Magnetron Sputtering Power and Gas Flow Rate on a High Conductivity and Low Drift Rate of Tungsten-Rhenium Thin-Film Thermocouples

Thin-Film Thermocouples (TFTCs) are characterized by their high spatial resolutions, low cost, high efficiency and low interference on the air flow. However, the thermal stability of TFTCs should be further improved for application since their accuracy is influenced by joule heat and temperature tim...

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Detalles Bibliográficos
Autores principales:	Zhang, Zhongkai, Tian, Bian, Cheng, Gong, Liu, Zhaojun, Liu, Jiangjiang, Zhang, Bingfei, Lei, Jiaming, Zhao, Na, Han, Feng, Fang, Xudong, Sun, Hao, Zhao, Libo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000736/ https://www.ncbi.nlm.nih.gov/pubmed/35407238 http://dx.doi.org/10.3390/nano12071120

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