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Micromechanical mode-localized electric current sensor

This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a s...

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Autores principales: Li, Han, Zhang, Zhao, Zu, Luhan, Hao, Yongcun, Chang, Honglong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9010471/
https://www.ncbi.nlm.nih.gov/pubmed/35498340
http://dx.doi.org/10.1038/s41378-022-00375-1
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author Li, Han
Zhang, Zhao
Zu, Luhan
Hao, Yongcun
Chang, Honglong
author_facet Li, Han
Zhang, Zhao
Zu, Luhan
Hao, Yongcun
Chang, Honglong
author_sort Li, Han
collection PubMed
description This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a silicon shunt resistor, which causes stiffness perturbation to one resonator. The mode-localization phenomenon alters the energy distribution in the weakly coupled resonator system. A theoretical model of current sensing is established, and the performance of the current sensor is determined: the sensitivity of the electric current sensor is 567/A, the noise floor is 69.3 nA/√Hz, the resolution is 183.6 nA, and the bias instability is 81.6 nA. The mode-localized electric current sensor provides a new approach for measuring sub-microampere currents for applications in nuclear physics, including for photocurrent signals and transistor leakage currents. It could also become a key component of a portable mode-localized multimeter when combined with a mode-localized voltmeter. In addition, it has the potential for use in studying sensor arrays to achieve higher resolution. [Image: see text]
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spelling pubmed-90104712022-04-28 Micromechanical mode-localized electric current sensor Li, Han Zhang, Zhao Zu, Luhan Hao, Yongcun Chang, Honglong Microsyst Nanoeng Article This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a silicon shunt resistor, which causes stiffness perturbation to one resonator. The mode-localization phenomenon alters the energy distribution in the weakly coupled resonator system. A theoretical model of current sensing is established, and the performance of the current sensor is determined: the sensitivity of the electric current sensor is 567/A, the noise floor is 69.3 nA/√Hz, the resolution is 183.6 nA, and the bias instability is 81.6 nA. The mode-localized electric current sensor provides a new approach for measuring sub-microampere currents for applications in nuclear physics, including for photocurrent signals and transistor leakage currents. It could also become a key component of a portable mode-localized multimeter when combined with a mode-localized voltmeter. In addition, it has the potential for use in studying sensor arrays to achieve higher resolution. [Image: see text] Nature Publishing Group UK 2022-04-14 /pmc/articles/PMC9010471/ /pubmed/35498340 http://dx.doi.org/10.1038/s41378-022-00375-1 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Li, Han
Zhang, Zhao
Zu, Luhan
Hao, Yongcun
Chang, Honglong
Micromechanical mode-localized electric current sensor
title Micromechanical mode-localized electric current sensor
title_full Micromechanical mode-localized electric current sensor
title_fullStr Micromechanical mode-localized electric current sensor
title_full_unstemmed Micromechanical mode-localized electric current sensor
title_short Micromechanical mode-localized electric current sensor
title_sort micromechanical mode-localized electric current sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9010471/
https://www.ncbi.nlm.nih.gov/pubmed/35498340
http://dx.doi.org/10.1038/s41378-022-00375-1
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