ITO film stack engineering for low-loss silicon optical modulators

The Indium Tin Oxide (ITO) platform is one of the promising solutions for state-of-the-art integrated optical modulators towards low-loss silicon photonics applications. One of the key challenges on this way is to optimize ITO-based thin films stacks for electro-optic modulators with both high extin...

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Detalles Bibliográficos
Autores principales: Lotkov, Evgeniy S., Baburin, Aleksandr S., Ryzhikov, Ilya A., Sorokina, Olga S., Ivanov, Anton I., Zverev, Alexander V., Ryzhkov, Vitaly V., Bykov, Igor V., Baryshev, Alexander V., Panfilov, Yuri V., Rodionov, Ilya A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9012746/
https://www.ncbi.nlm.nih.gov/pubmed/35428848
http://dx.doi.org/10.1038/s41598-022-09973-5

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