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Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9024628/ https://www.ncbi.nlm.nih.gov/pubmed/35457864 http://dx.doi.org/10.3390/mi13040559 |
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author | Li, Donghao Li, Bin Tang, Bo Zhang, Peng Yang, Yan Liu, Ruonan Xie, Ling Li, Zhihua |
author_facet | Li, Donghao Li, Bin Tang, Bo Zhang, Peng Yang, Yan Liu, Ruonan Xie, Ling Li, Zhihua |
author_sort | Li, Donghao |
collection | PubMed |
description | Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of the devices. In this work, a silicon nitride bent directional coupler with large bandwidth, large fabrication tolerance, and low thermal sensitivity is proposed and demonstrated through simulation analysis and experiments. Moreover, the fabrication process of 400 nm thick silicon nitride photonic devices is described, which are compatible with complementary metal–oxide–semiconductor technology. The 1 dB bandwidth of the bent waveguide coupler can reach 80 nm, and the thermal sensitivity is reduced by 85% compared to the silicon-based devices. |
format | Online Article Text |
id | pubmed-9024628 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-90246282022-04-23 Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity Li, Donghao Li, Bin Tang, Bo Zhang, Peng Yang, Yan Liu, Ruonan Xie, Ling Li, Zhihua Micromachines (Basel) Article Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of the devices. In this work, a silicon nitride bent directional coupler with large bandwidth, large fabrication tolerance, and low thermal sensitivity is proposed and demonstrated through simulation analysis and experiments. Moreover, the fabrication process of 400 nm thick silicon nitride photonic devices is described, which are compatible with complementary metal–oxide–semiconductor technology. The 1 dB bandwidth of the bent waveguide coupler can reach 80 nm, and the thermal sensitivity is reduced by 85% compared to the silicon-based devices. MDPI 2022-03-31 /pmc/articles/PMC9024628/ /pubmed/35457864 http://dx.doi.org/10.3390/mi13040559 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Li, Donghao Li, Bin Tang, Bo Zhang, Peng Yang, Yan Liu, Ruonan Xie, Ling Li, Zhihua Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
title | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
title_full | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
title_fullStr | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
title_full_unstemmed | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
title_short | Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity |
title_sort | broadband silicon nitride power splitter based on bent directional couplers with low thermal sensitivity |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9024628/ https://www.ncbi.nlm.nih.gov/pubmed/35457864 http://dx.doi.org/10.3390/mi13040559 |
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