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Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity

Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of...

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Detalles Bibliográficos
Autores principales: Li, Donghao, Li, Bin, Tang, Bo, Zhang, Peng, Yang, Yan, Liu, Ruonan, Xie, Ling, Li, Zhihua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9024628/
https://www.ncbi.nlm.nih.gov/pubmed/35457864
http://dx.doi.org/10.3390/mi13040559
_version_ 1784690647919230976
author Li, Donghao
Li, Bin
Tang, Bo
Zhang, Peng
Yang, Yan
Liu, Ruonan
Xie, Ling
Li, Zhihua
author_facet Li, Donghao
Li, Bin
Tang, Bo
Zhang, Peng
Yang, Yan
Liu, Ruonan
Xie, Ling
Li, Zhihua
author_sort Li, Donghao
collection PubMed
description Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of the devices. In this work, a silicon nitride bent directional coupler with large bandwidth, large fabrication tolerance, and low thermal sensitivity is proposed and demonstrated through simulation analysis and experiments. Moreover, the fabrication process of 400 nm thick silicon nitride photonic devices is described, which are compatible with complementary metal–oxide–semiconductor technology. The 1 dB bandwidth of the bent waveguide coupler can reach 80 nm, and the thermal sensitivity is reduced by 85% compared to the silicon-based devices.
format Online
Article
Text
id pubmed-9024628
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-90246282022-04-23 Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity Li, Donghao Li, Bin Tang, Bo Zhang, Peng Yang, Yan Liu, Ruonan Xie, Ling Li, Zhihua Micromachines (Basel) Article Directional couplers, as power splitters, have provided a significant contribution for light splitting and combining in silicon photonics. However, the splitting ratio of conventional directional couplers is very sensitive to wavelength, which limits the bandwidth and the transmission performance of the devices. In this work, a silicon nitride bent directional coupler with large bandwidth, large fabrication tolerance, and low thermal sensitivity is proposed and demonstrated through simulation analysis and experiments. Moreover, the fabrication process of 400 nm thick silicon nitride photonic devices is described, which are compatible with complementary metal–oxide–semiconductor technology. The 1 dB bandwidth of the bent waveguide coupler can reach 80 nm, and the thermal sensitivity is reduced by 85% compared to the silicon-based devices. MDPI 2022-03-31 /pmc/articles/PMC9024628/ /pubmed/35457864 http://dx.doi.org/10.3390/mi13040559 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Donghao
Li, Bin
Tang, Bo
Zhang, Peng
Yang, Yan
Liu, Ruonan
Xie, Ling
Li, Zhihua
Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
title Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
title_full Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
title_fullStr Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
title_full_unstemmed Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
title_short Broadband Silicon Nitride Power Splitter Based on Bent Directional Couplers with Low Thermal Sensitivity
title_sort broadband silicon nitride power splitter based on bent directional couplers with low thermal sensitivity
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9024628/
https://www.ncbi.nlm.nih.gov/pubmed/35457864
http://dx.doi.org/10.3390/mi13040559
work_keys_str_mv AT lidonghao broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT libin broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT tangbo broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT zhangpeng broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT yangyan broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT liuruonan broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT xieling broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity
AT lizhihua broadbandsiliconnitridepowersplitterbasedonbentdirectionalcouplerswithlowthermalsensitivity