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Simulation and Optimization of a Planar-Type Micro-Hotplate with Si(3)N(4)-SiO(2) Transverse Composite Dielectric Layer and Annular Heater

Micro-hotplates (MHPs) have become widely used basic structures in many micro sensors and actuators. Based on the analysis of the general heat transfer model, we propose a new MHP design based on a transversal composite dielectric layer, consisting of different heat transfer materials. Two general p...

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Detalles Bibliográficos
Autores principales:	Wei, Guangfen, Wang, Pengfei, Li, Meihua, Lin, Zhonghai, Nai, Changxin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025124/ https://www.ncbi.nlm.nih.gov/pubmed/35457907 http://dx.doi.org/10.3390/mi13040601

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