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Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al(0.68)Sc(0.32)N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm(2) (Design 1) and 4 × 6 mm(2) (Design 2) footprint with 600 nm AlN or 2000 nm Al(0.68)Sc(0.32)N as pie...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025745/ https://www.ncbi.nlm.nih.gov/pubmed/35457927 http://dx.doi.org/10.3390/mi13040625 |
Sumario: | Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al(0.68)Sc(0.32)N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm(2) (Design 1) and 4 × 6 mm(2) (Design 2) footprint with 600 nm AlN or 2000 nm Al(0.68)Sc(0.32)N as piezoelectric transducer material are investigated. The chip with Design 1 and Al(0.68)Sc(0.32)N has a resonance frequency of 1.8 kHz and a static scan angle of 38.4° at 400 V DC was measured. Design 2 has its resonance at 2.1 kHz. The maximum static scan angle is 55.6° at 220 V DC, which is the maximum deflection measurable with the experimental setup. The static deflection per electric field is increased by a factor of 10, due to the optimization of the design and the research and development of high-performance piezoelectric transducer materials with large piezoelectric coefficient and high electrical breakthrough voltage. |
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