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Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al(0.68)Sc(0.32)N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm(2) (Design 1) and 4 × 6 mm(2) (Design 2) footprint with 600 nm AlN or 2000 nm Al(0.68)Sc(0.32)N as pie...

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Autores principales: Stoeckel, Chris, Meinel, Katja, Melzer, Marcel, Žukauskaitė, Agnė, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Kuhn, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025745/
https://www.ncbi.nlm.nih.gov/pubmed/35457927
http://dx.doi.org/10.3390/mi13040625
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author Stoeckel, Chris
Meinel, Katja
Melzer, Marcel
Žukauskaitė, Agnė
Zimmermann, Sven
Forke, Roman
Hiller, Karla
Kuhn, Harald
author_facet Stoeckel, Chris
Meinel, Katja
Melzer, Marcel
Žukauskaitė, Agnė
Zimmermann, Sven
Forke, Roman
Hiller, Karla
Kuhn, Harald
author_sort Stoeckel, Chris
collection PubMed
description Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al(0.68)Sc(0.32)N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm(2) (Design 1) and 4 × 6 mm(2) (Design 2) footprint with 600 nm AlN or 2000 nm Al(0.68)Sc(0.32)N as piezoelectric transducer material are investigated. The chip with Design 1 and Al(0.68)Sc(0.32)N has a resonance frequency of 1.8 kHz and a static scan angle of 38.4° at 400 V DC was measured. Design 2 has its resonance at 2.1 kHz. The maximum static scan angle is 55.6° at 220 V DC, which is the maximum deflection measurable with the experimental setup. The static deflection per electric field is increased by a factor of 10, due to the optimization of the design and the research and development of high-performance piezoelectric transducer materials with large piezoelectric coefficient and high electrical breakthrough voltage.
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spelling pubmed-90257452022-04-23 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stoeckel, Chris Meinel, Katja Melzer, Marcel Žukauskaitė, Agnė Zimmermann, Sven Forke, Roman Hiller, Karla Kuhn, Harald Micromachines (Basel) Article Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al(0.68)Sc(0.32)N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm(2) (Design 1) and 4 × 6 mm(2) (Design 2) footprint with 600 nm AlN or 2000 nm Al(0.68)Sc(0.32)N as piezoelectric transducer material are investigated. The chip with Design 1 and Al(0.68)Sc(0.32)N has a resonance frequency of 1.8 kHz and a static scan angle of 38.4° at 400 V DC was measured. Design 2 has its resonance at 2.1 kHz. The maximum static scan angle is 55.6° at 220 V DC, which is the maximum deflection measurable with the experimental setup. The static deflection per electric field is increased by a factor of 10, due to the optimization of the design and the research and development of high-performance piezoelectric transducer materials with large piezoelectric coefficient and high electrical breakthrough voltage. MDPI 2022-04-15 /pmc/articles/PMC9025745/ /pubmed/35457927 http://dx.doi.org/10.3390/mi13040625 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Stoeckel, Chris
Meinel, Katja
Melzer, Marcel
Žukauskaitė, Agnė
Zimmermann, Sven
Forke, Roman
Hiller, Karla
Kuhn, Harald
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
title Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
title_full Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
title_fullStr Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
title_full_unstemmed Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
title_short Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
title_sort static high voltage actuation of piezoelectric aln and alscn based scanning micromirrors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025745/
https://www.ncbi.nlm.nih.gov/pubmed/35457927
http://dx.doi.org/10.3390/mi13040625
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