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Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al(0.68)Sc(0.32)N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm(2) (Design 1) and 4 × 6 mm(2) (Design 2) footprint with 600 nm AlN or 2000 nm Al(0.68)Sc(0.32)N as pie...

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Detalles Bibliográficos
Autores principales:	Stoeckel, Chris, Meinel, Katja, Melzer, Marcel, Žukauskaitė, Agnė, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Kuhn, Harald
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025745/ https://www.ncbi.nlm.nih.gov/pubmed/35457927 http://dx.doi.org/10.3390/mi13040625

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