Method for Film Thickness Mapping with an Astigmatic Optical Profilometer

An astigmatic optical profilometer is a precision instrument with advantages such as high resolution, high bandwidth, a compact size, and low cost. However, current astigmatic optical profilometers measure only surface morphology, and their potential for capturing subsurface information remains unde...

Descripción completa

Detalles Bibliográficos
Autores principales: Liao, Hsien-Shun, Cheng, Shih-Han, Hwu, En-Te
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9027714/
https://www.ncbi.nlm.nih.gov/pubmed/35458849
http://dx.doi.org/10.3390/s22082865

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9027714/
https://www.ncbi.nlm.nih.gov/pubmed/35458849
http://dx.doi.org/10.3390/s22082865

Ejemplares similares