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Method for Film Thickness Mapping with an Astigmatic Optical Profilometer
An astigmatic optical profilometer is a precision instrument with advantages such as high resolution, high bandwidth, a compact size, and low cost. However, current astigmatic optical profilometers measure only surface morphology, and their potential for capturing subsurface information remains unde...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9027714/ https://www.ncbi.nlm.nih.gov/pubmed/35458849 http://dx.doi.org/10.3390/s22082865 |