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Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges
The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom ([Formula: see text] , [Formula: see text] ,...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9028929/ https://www.ncbi.nlm.nih.gov/pubmed/35457824 http://dx.doi.org/10.3390/mi13040518 |
Sumario: | The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom ([Formula: see text] , [Formula: see text] , [Formula: see text] , [Formula: see text]) was designed. The micro-displacement worktable was composed of three different flexure hinges. The adjustment ranges and adjustment accuracy of flexure hinges in terms of their respective degrees were improved. The micro-displacement worktable performance was examined by FEA (Finite Element Method). The maximum displacement that was adjusted in [Formula: see text] and [Formula: see text] was 1.67 µm and 1.74 µm. The maximum angle adjusted in the [Formula: see text] and [Formula: see text] direction was 14.90° and 18.58°. A test platform was developed for micro-displacement worktable performance tests. The simulation results showed a good agreement with the experimental results. |
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