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A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conduct...

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Autores principales: Guo, Ying, Li, Bo, Zhang, Qi, He, Xiao-Ting, Sun, Jun-Yi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029114/
https://www.ncbi.nlm.nih.gov/pubmed/35458832
http://dx.doi.org/10.3390/s22082848
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author Guo, Ying
Li, Bo
Zhang, Qi
He, Xiao-Ting
Sun, Jun-Yi
author_facet Guo, Ying
Li, Bo
Zhang, Qi
He, Xiao-Ting
Sun, Jun-Yi
author_sort Guo, Ying
collection PubMed
description The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conductive thin film deflects elastically, which in turn moves the conductive thin plate (as a movable upper electrode plate of the parallel plate capacitor) towards the lower electrode plate, resulting in a change in the capacitance of the capacitor. Therefore, the applied pressure can be determined by measuring the capacitance change, based on the closed-form solution for the elastic behavior of the annular thin film under pressure. Such capacitive pressure sensors are more suitable for large-sized sensors such as those used for building-facade wind pressure measurements, etc. In this paper, a further theoretical study of such capacitive pressure sensors is presented. The newly presented, more refined closed-form solution can greatly reduce the output pressure error under the same input capacitance, in comparison with the previously presented closed-form solution. A numerical example of how to use the resulting closed-form solution to numerically calibrate input–output characteristics is given for the first time. The variation trend of pressure operation ranges and input–output characteristics with important parametric variations, which can be used for guiding the design of such capacitive pressure sensors, is investigated.
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spelling pubmed-90291142022-04-23 A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration Guo, Ying Li, Bo Zhang, Qi He, Xiao-Ting Sun, Jun-Yi Sensors (Basel) Article The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conductive thin film deflects elastically, which in turn moves the conductive thin plate (as a movable upper electrode plate of the parallel plate capacitor) towards the lower electrode plate, resulting in a change in the capacitance of the capacitor. Therefore, the applied pressure can be determined by measuring the capacitance change, based on the closed-form solution for the elastic behavior of the annular thin film under pressure. Such capacitive pressure sensors are more suitable for large-sized sensors such as those used for building-facade wind pressure measurements, etc. In this paper, a further theoretical study of such capacitive pressure sensors is presented. The newly presented, more refined closed-form solution can greatly reduce the output pressure error under the same input capacitance, in comparison with the previously presented closed-form solution. A numerical example of how to use the resulting closed-form solution to numerically calibrate input–output characteristics is given for the first time. The variation trend of pressure operation ranges and input–output characteristics with important parametric variations, which can be used for guiding the design of such capacitive pressure sensors, is investigated. MDPI 2022-04-07 /pmc/articles/PMC9029114/ /pubmed/35458832 http://dx.doi.org/10.3390/s22082848 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Guo, Ying
Li, Bo
Zhang, Qi
He, Xiao-Ting
Sun, Jun-Yi
A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
title A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
title_full A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
title_fullStr A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
title_full_unstemmed A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
title_short A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
title_sort further theoretical study of capacitive pressure sensors based on thin film elastic deflection and parallel plate capacitor: refined closed-form solution and numerical calibration
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029114/
https://www.ncbi.nlm.nih.gov/pubmed/35458832
http://dx.doi.org/10.3390/s22082848
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