A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conduct...

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Detalles Bibliográficos
Autores principales: Guo, Ying, Li, Bo, Zhang, Qi, He, Xiao-Ting, Sun, Jun-Yi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029114/
https://www.ncbi.nlm.nih.gov/pubmed/35458832
http://dx.doi.org/10.3390/s22082848

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029114/
https://www.ncbi.nlm.nih.gov/pubmed/35458832
http://dx.doi.org/10.3390/s22082848

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