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A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conduct...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029114/ https://www.ncbi.nlm.nih.gov/pubmed/35458832 http://dx.doi.org/10.3390/s22082848 |