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Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor

This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact...

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Autores principales: Algamili, Abdullah S., Khir, Mohd Haris, Ahmed, Abdelaziz Y., Rabih, Almur A., Ba-Hashwan, Saeed S., Alabsi, Sami S., Al-Mahdi, Osamah L., Isyaku, Usman B., Ahmed, Mawahib G., Junaid, Muhammad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029416/
https://www.ncbi.nlm.nih.gov/pubmed/35457830
http://dx.doi.org/10.3390/mi13040525
_version_ 1784691872435798016
author Algamili, Abdullah S.
Khir, Mohd Haris
Ahmed, Abdelaziz Y.
Rabih, Almur A.
Ba-Hashwan, Saeed S.
Alabsi, Sami S.
Al-Mahdi, Osamah L.
Isyaku, Usman B.
Ahmed, Mawahib G.
Junaid, Muhammad
author_facet Algamili, Abdullah S.
Khir, Mohd Haris
Ahmed, Abdelaziz Y.
Rabih, Almur A.
Ba-Hashwan, Saeed S.
Alabsi, Sami S.
Al-Mahdi, Osamah L.
Isyaku, Usman B.
Ahmed, Mawahib G.
Junaid, Muhammad
author_sort Algamili, Abdullah S.
collection PubMed
description This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact size and low power consumption, micro-structures enable a well-designed gas-sensing-layer interaction, resulting in higher sensitivity compared to the ordinary materials. The aim of conducting the characterization is to compare the measured and calculated resistance values of the micro-heater and the temperature sensor. The temperature coefficient of resistance (TCR) of the temperature sensor has been estimated by raising and dropping the temperature throughout a 25–110 °C range. The sensitivity of these sensors is dependent on the TCR value. The temperature sensor resistance was observed to rise alongside the rising environmental temperatures or increasing voltages given to the micro-heater, with a correlation value of 0.99. When compared to the TCR reported in the literature for the gold material 0.0034 °C [Formula: see text] , the average TCR was determined to be 0.00325 °C [Formula: see text] and 0.0035 °C [Formula: see text] , respectively, indicating inaccuracies of 4.6% and 2.9%, respectively. The variation between observed and reported values is assumed to be caused by the fabrication tolerances of the design dimensions or material characteristics.
format Online
Article
Text
id pubmed-9029416
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-90294162022-04-23 Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor Algamili, Abdullah S. Khir, Mohd Haris Ahmed, Abdelaziz Y. Rabih, Almur A. Ba-Hashwan, Saeed S. Alabsi, Sami S. Al-Mahdi, Osamah L. Isyaku, Usman B. Ahmed, Mawahib G. Junaid, Muhammad Micromachines (Basel) Article This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact size and low power consumption, micro-structures enable a well-designed gas-sensing-layer interaction, resulting in higher sensitivity compared to the ordinary materials. The aim of conducting the characterization is to compare the measured and calculated resistance values of the micro-heater and the temperature sensor. The temperature coefficient of resistance (TCR) of the temperature sensor has been estimated by raising and dropping the temperature throughout a 25–110 °C range. The sensitivity of these sensors is dependent on the TCR value. The temperature sensor resistance was observed to rise alongside the rising environmental temperatures or increasing voltages given to the micro-heater, with a correlation value of 0.99. When compared to the TCR reported in the literature for the gold material 0.0034 °C [Formula: see text] , the average TCR was determined to be 0.00325 °C [Formula: see text] and 0.0035 °C [Formula: see text] , respectively, indicating inaccuracies of 4.6% and 2.9%, respectively. The variation between observed and reported values is assumed to be caused by the fabrication tolerances of the design dimensions or material characteristics. MDPI 2022-03-26 /pmc/articles/PMC9029416/ /pubmed/35457830 http://dx.doi.org/10.3390/mi13040525 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Algamili, Abdullah S.
Khir, Mohd Haris
Ahmed, Abdelaziz Y.
Rabih, Almur A.
Ba-Hashwan, Saeed S.
Alabsi, Sami S.
Al-Mahdi, Osamah L.
Isyaku, Usman B.
Ahmed, Mawahib G.
Junaid, Muhammad
Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
title Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
title_full Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
title_fullStr Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
title_full_unstemmed Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
title_short Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
title_sort fabrication and characterization of the micro-heater and temperature sensor for polymumps-based mems gas sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029416/
https://www.ncbi.nlm.nih.gov/pubmed/35457830
http://dx.doi.org/10.3390/mi13040525
work_keys_str_mv AT algamiliabdullahs fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT khirmohdharis fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT ahmedabdelazizy fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT rabihalmura fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT bahashwansaeeds fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT alabsisamis fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT almahdiosamahl fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT isyakuusmanb fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT ahmedmawahibg fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor
AT junaidmuhammad fabricationandcharacterizationofthemicroheaterandtemperaturesensorforpolymumpsbasedmemsgassensor