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Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor

This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact...

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Detalles Bibliográficos
Autores principales:	Algamili, Abdullah S., Khir, Mohd Haris, Ahmed, Abdelaziz Y., Rabih, Almur A., Ba-Hashwan, Saeed S., Alabsi, Sami S., Al-Mahdi, Osamah L., Isyaku, Usman B., Ahmed, Mawahib G., Junaid, Muhammad
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029416/ https://www.ncbi.nlm.nih.gov/pubmed/35457830 http://dx.doi.org/10.3390/mi13040525

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