Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect

The paper presents a novel non-contact microelectromechanical systems (MEMS) voltage sensor based on the piezoresistive effect of single-crystal silicon. The novelty of the proposed sensor design lies in the implementation of unique single-crystal silicon piezoresistive beams for voltage measurement...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Jiachen, Liu, Jun, Peng, Chunrong, Liu, Xiangming, Wu, Zhengwei, Zheng, Fengjie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029426/
https://www.ncbi.nlm.nih.gov/pubmed/35457923
http://dx.doi.org/10.3390/mi13040619

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029426/
https://www.ncbi.nlm.nih.gov/pubmed/35457923
http://dx.doi.org/10.3390/mi13040619

Ejemplares similares