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Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect

The paper presents a novel non-contact microelectromechanical systems (MEMS) voltage sensor based on the piezoresistive effect of single-crystal silicon. The novelty of the proposed sensor design lies in the implementation of unique single-crystal silicon piezoresistive beams for voltage measurement...

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Detalles Bibliográficos
Autores principales:	Li, Jiachen, Liu, Jun, Peng, Chunrong, Liu, Xiangming, Wu, Zhengwei, Zheng, Fengjie
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029426/ https://www.ncbi.nlm.nih.gov/pubmed/35457923 http://dx.doi.org/10.3390/mi13040619

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