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Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant

Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based on a Potassium Hydroxide, wate...

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Detalles Bibliográficos
Autores principales: Butkutė, Agnė, Merkininkaitė, Greta, Jurkšas, Tomas, Stančikas, Jokūbas, Baravykas, Tomas, Vargalis, Rokas, Tičkūnas, Titas, Bachmann, Julien, Šakirzanovas, Simas, Sirutkaitis, Valdas, Jonušauskas, Linas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9030282/
https://www.ncbi.nlm.nih.gov/pubmed/35454510
http://dx.doi.org/10.3390/ma15082817