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Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d(31) and d(33) of AlN and AlScN Thin Films

Accurate and efficient measurements of the piezoelectric properties of AlN and AlScN films are very important for the design and simulation of micro-electro-mechanical system (MEMS) sensors and actuator devices. In this study, a process control monitor (PCM) structure compatible with the device manu...

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Detalles Bibliográficos
Autores principales:	Zhang, Hao, Wang, Yang, Wang, Lihao, Liu, Yichen, Chen, Hao, Wu, Zhenyu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9030765/ https://www.ncbi.nlm.nih.gov/pubmed/35457885 http://dx.doi.org/10.3390/mi13040581

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