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A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO(2) substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic fie...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9032286/ https://www.ncbi.nlm.nih.gov/pubmed/35457932 http://dx.doi.org/10.3390/mi13040628 |
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author | Liu, Wenyao Li, Wei Liu, Chenxi Xing, Enbo Zhou, Yanru Liu, Lai Tang, Jun |
author_facet | Liu, Wenyao Li, Wei Liu, Chenxi Xing, Enbo Zhou, Yanru Liu, Lai Tang, Jun |
author_sort | Liu, Wenyao |
collection | PubMed |
description | This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO(2) substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the x-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO(2) substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors. |
format | Online Article Text |
id | pubmed-9032286 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-90322862022-04-23 A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator Liu, Wenyao Li, Wei Liu, Chenxi Xing, Enbo Zhou, Yanru Liu, Lai Tang, Jun Micromachines (Basel) Article This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO(2) substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the x-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO(2) substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors. MDPI 2022-04-16 /pmc/articles/PMC9032286/ /pubmed/35457932 http://dx.doi.org/10.3390/mi13040628 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Liu, Wenyao Li, Wei Liu, Chenxi Xing, Enbo Zhou, Yanru Liu, Lai Tang, Jun A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
title | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
title_full | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
title_fullStr | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
title_full_unstemmed | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
title_short | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
title_sort | high-sensitivity resonant magnetic sensor based on graphene nanomechanical resonator |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9032286/ https://www.ncbi.nlm.nih.gov/pubmed/35457932 http://dx.doi.org/10.3390/mi13040628 |
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