Parametric scheme for rapid nanopattern replication via electrohydrodynamic instability

Electrohydrodynamic (EHD) instability patterning exhibits substantial potential for application as a next-generation lithographic technique; nevertheless, its development continues to be hindered by the lack of process parameter controllability, especially when replicating sub-microscale pattern fea...

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Detalles Bibliográficos
Autores principales: Hwang, Jaeseok, Park, Hyunje, Lee, Jaejong, Kang, Dae Joon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2021
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9033445/
https://www.ncbi.nlm.nih.gov/pubmed/35480914
http://dx.doi.org/10.1039/d1ra01728d

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9033445/
https://www.ncbi.nlm.nih.gov/pubmed/35480914
http://dx.doi.org/10.1039/d1ra01728d

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