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Parametric scheme for rapid nanopattern replication via electrohydrodynamic instability
Electrohydrodynamic (EHD) instability patterning exhibits substantial potential for application as a next-generation lithographic technique; nevertheless, its development continues to be hindered by the lack of process parameter controllability, especially when replicating sub-microscale pattern fea...
Autores principales: | Hwang, Jaeseok, Park, Hyunje, Lee, Jaejong, Kang, Dae Joon |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9033445/ https://www.ncbi.nlm.nih.gov/pubmed/35480914 http://dx.doi.org/10.1039/d1ra01728d |
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