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An automated chemical vapor deposition setup for 2D materials
Chemical vapour deposition (CVD) provides a versatile and scalable route to synthesize various 2D materials. Lowering the barrier for access, customization, and cost of CVD equipment will benefit a large and multidisciplinary research community. We report an open-source and automated CVD setup which...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9041197/ https://www.ncbi.nlm.nih.gov/pubmed/35492051 http://dx.doi.org/10.1016/j.ohx.2020.e00165 |