Contact Printing of Multilayered Thin Films with Shape Memory Polymers

[Image: see text] This study describes a method for transfer printing microarrays of multilayered organic–inorganic thin films using shape memory printing stamps and microstructured donor substrates. By applying the films on the microstructured donor substrates during physical vapor deposition and modulating the interfacial adhesion using a shape memory elastomer during printing, this method achieves (1) high lateral and feature-edge resolution and (2) high transfer efficiency from the donor to the receiver substrate. For demonstration, polyurethane-acrylate stamps and silicon/silicon oxide donor substrates were used in the large-area transfer printing of organic–inorganic thin-film stacks with micrometer lateral dimensions and sub-200 nm thickness.