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Light-induced surface patterning of alumina
Micro/nano-patterned alumina surfaces are important in a variety fields such as chemical/biotechnology, surface science, and microelectro-mechanical systems. However, for patterning alumina surfaces, it still remains a challenge to have a lithographic tool that has large flexibility in design layout...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9054122/ https://www.ncbi.nlm.nih.gov/pubmed/35520447 http://dx.doi.org/10.1039/d0ra02931a |