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Fabrication of black aluminium thin films by magnetron sputtering
Black aluminium thin films were prepared by direct current (DC) pulsed magnetron sputtering. The N(2) concentration in the Ar–N(2) mixture that was used as the deposition atmosphere was varied from 0 to 10%, and its impact on the film growth and optical properties was studied. A strong change in the...
| Autores principales: | , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9054304/ https://www.ncbi.nlm.nih.gov/pubmed/35517742 http://dx.doi.org/10.1039/d0ra00866d |