Material-specific high-resolution table-top extreme ultraviolet microscopy

Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At the same time, EUV radiation has significantly larger penetr...

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Detalles Bibliográficos
Autores principales: Eschen, Wilhelm, Loetgering, Lars, Schuster, Vittoria, Klas, Robert, Kirsche, Alexander, Berthold, Lutz, Steinert, Michael, Pertsch, Thomas, Gross, Herbert, Krause, Michael, Limpert, Jens, Rothhardt, Jan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9054792/
https://www.ncbi.nlm.nih.gov/pubmed/35487910
http://dx.doi.org/10.1038/s41377-022-00797-6

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