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Chemical bonding of nitrogen formed by nitridation of crystalline and amorphous aluminum oxide studied by X-ray photoelectron spectroscopy
Numerous efforts have already been made to optimize nitridation of crystalline sapphire (c-Al(2)O(3)) substrates whereas very little attention has been paid to nitridation of amorphous aluminum oxide layers (a-AlO(x)). An extensive analysis of the reaction of amorphous aluminum oxide films with nitr...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9055654/ https://www.ncbi.nlm.nih.gov/pubmed/35519109 http://dx.doi.org/10.1039/d0ra05104g |