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Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds

Volatile metal β-diketonates are well-known precursors used in Metal–Organic Chemical Vapour Deposition (MOCVD) for manufacturing film materials. Knowledge of vapour pressures and sublimation/vaporization thermodynamics of the MOCVD precursors is indispensable for optimization of deposition. However...

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Detalles Bibliográficos
Autores principales: Zherikova, Kseniya V., Verevkin, Sergey P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9057213/
https://www.ncbi.nlm.nih.gov/pubmed/35517534
http://dx.doi.org/10.1039/d0ra06880b
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author Zherikova, Kseniya V.
Verevkin, Sergey P.
author_facet Zherikova, Kseniya V.
Verevkin, Sergey P.
author_sort Zherikova, Kseniya V.
collection PubMed
description Volatile metal β-diketonates are well-known precursors used in Metal–Organic Chemical Vapour Deposition (MOCVD) for manufacturing film materials. Knowledge of vapour pressures and sublimation/vaporization thermodynamics of the MOCVD precursors is indispensable for optimization of deposition. However, the spread of available data could be unacceptably large for the same precursor for several reasons related to its chemical nature or incorrectly configured conditions of tensimetric investigation. In this work, we have developed an algorithm for a general diagnostic check, based on principles of group-additivity, for thermochemistry on solid–gas, liquid–gas, and solid–liquid phase transitions of metal–organic compounds and applied it to tris(beta-diketonato)iron complexes. The diagnostic tool helps to localize general “healthy” thermochemical interconnected data, and, subsequently, isolate molecules with definitely “ill” properties from the data pool. This diagnostic tool could be expanded and adapted for β-diketonate complexes with metals other than iron.
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spelling pubmed-90572132022-05-04 Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds Zherikova, Kseniya V. Verevkin, Sergey P. RSC Adv Chemistry Volatile metal β-diketonates are well-known precursors used in Metal–Organic Chemical Vapour Deposition (MOCVD) for manufacturing film materials. Knowledge of vapour pressures and sublimation/vaporization thermodynamics of the MOCVD precursors is indispensable for optimization of deposition. However, the spread of available data could be unacceptably large for the same precursor for several reasons related to its chemical nature or incorrectly configured conditions of tensimetric investigation. In this work, we have developed an algorithm for a general diagnostic check, based on principles of group-additivity, for thermochemistry on solid–gas, liquid–gas, and solid–liquid phase transitions of metal–organic compounds and applied it to tris(beta-diketonato)iron complexes. The diagnostic tool helps to localize general “healthy” thermochemical interconnected data, and, subsequently, isolate molecules with definitely “ill” properties from the data pool. This diagnostic tool could be expanded and adapted for β-diketonate complexes with metals other than iron. The Royal Society of Chemistry 2020-10-15 /pmc/articles/PMC9057213/ /pubmed/35517534 http://dx.doi.org/10.1039/d0ra06880b Text en This journal is © The Royal Society of Chemistry https://creativecommons.org/licenses/by-nc/3.0/
spellingShingle Chemistry
Zherikova, Kseniya V.
Verevkin, Sergey P.
Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
title Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
title_full Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
title_fullStr Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
title_full_unstemmed Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
title_short Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
title_sort error or exemption to the rule? development of a diagnostic check for thermochemistry of metal–organic compounds
topic Chemistry
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9057213/
https://www.ncbi.nlm.nih.gov/pubmed/35517534
http://dx.doi.org/10.1039/d0ra06880b
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