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Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds
Volatile metal β-diketonates are well-known precursors used in Metal–Organic Chemical Vapour Deposition (MOCVD) for manufacturing film materials. Knowledge of vapour pressures and sublimation/vaporization thermodynamics of the MOCVD precursors is indispensable for optimization of deposition. However...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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The Royal Society of Chemistry
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9057213/ https://www.ncbi.nlm.nih.gov/pubmed/35517534 http://dx.doi.org/10.1039/d0ra06880b |