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Error or exemption to the rule? Development of a diagnostic check for thermochemistry of metal–organic compounds

Volatile metal β-diketonates are well-known precursors used in Metal–Organic Chemical Vapour Deposition (MOCVD) for manufacturing film materials. Knowledge of vapour pressures and sublimation/vaporization thermodynamics of the MOCVD precursors is indispensable for optimization of deposition. However...

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Detalles Bibliográficos
Autores principales:	Zherikova, Kseniya V., Verevkin, Sergey P.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2020
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9057213/ https://www.ncbi.nlm.nih.gov/pubmed/35517534 http://dx.doi.org/10.1039/d0ra06880b

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